Payment Terms | T/T, L/C |
Resolution | SE:3nm@30KV,8nm@3kV; BSE :4nm@30KV |
Magnification | 1x-450000x |
Specimen Stage | Five axes stage |
Electron Gun | Pre-aligned tungsten filament |
Brand Name | KYKY |
Model Number | EM6910 |
Place of Origin | China |
Certification | CE |
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Product Specification
Payment Terms | T/T, L/C | Resolution | SE:3nm@30KV,8nm@3kV; BSE :4nm@30KV |
Magnification | 1x-450000x | Specimen Stage | Five axes stage |
Electron Gun | Pre-aligned tungsten filament | Brand Name | KYKY |
Model Number | EM6910 | Place of Origin | China |
Certification | CE | ||
High Light | sem electron microscope ,sem machine |
As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market
Advanteges:
◆ Optional low vacuum modules(LVSE,LVBSE)
◆ Rich automation functions
◆ Column/Chamber/Electric System Customization
◆ Optional Big size chamber
◆ Wide field navigation camera
◆ Rich expanding attachments
Specifications:
Item | EM6910 Tungsten Filament SEM | |
Resolution | SE:3nm@30KV,8nm@3kV; BSE :4nm@30KV | |
Magnification | 1x-450000x | |
Electron Gun | Pre-aligned tungsten filament | |
Accelerating Voltage |
0.2kV-30kV
|
|
Vacuum system
|
Turbo Molecular pump +mechanical pump
|
|
Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
Specimen Stage | Five axes stage | |
Travel | X(Auto) | 0 ~ 80mm |
Range | Y(Auto) | 0 ~ 50mm |
Z(Manual) | 0 ~ 30mm | |
R(Manual) | 360° | |
T(Manual) | -5° ~ 70° | |
Max Specimen Diameter | 175mm | |
Detector |
Secondary electron detector
|
|
Semiconductor BSE detector※
|
||
Infrared CCD
|
||
Low-vacuum SED※/ Low-vacuum BSED ※
|
||
Modification | Stage Upgrade;EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage ; Micro-nano manipulator; SEM+Coating Machine;SEM+Laser | |
Accessories | LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
Low vacuum function※
|
Vacuum level 10-270Pa SE:4nm@30kv,50Pa
|
Company Details
Business Type:
Manufacturer
Year Established:
1958
Employee Number:
>500
Ecer Certification:
Site Member
KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world. KYKY invented the first set of Turbo Molecular Pu... KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world. KYKY invented the first set of Turbo Molecular Pu...
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