Shaanxi Peakrise Metal Co.,Ltd
| Payment Terms | T/T |
| Supply Ability | 5tons/month |
| Delivery Time | 5~7days |
| Packaging Details | Plywood case |
| Name | PVD coating Tantalum target |
| Grade | Ta1 Ta2 RO5200 RO5400 RO5252 RO5255 |
| Purity | ≥99.95% |
| Density | 16.68g/cm3 |
| Surface | machined surface |
| Standard | ASTM B708 |
| Delivery status | Annealed |
| Shape | Flat target Rotating target Special-shaped customization |
| Brand Name | PRM |
| Model Number | Custom |
| Certification | ISO9001 |
| Place of Origin | China |
View Detail Information
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Product Specification
| Payment Terms | T/T | Supply Ability | 5tons/month |
| Delivery Time | 5~7days | Packaging Details | Plywood case |
| Name | PVD coating Tantalum target | Grade | Ta1 Ta2 RO5200 RO5400 RO5252 RO5255 |
| Purity | ≥99.95% | Density | 16.68g/cm3 |
| Surface | machined surface | Standard | ASTM B708 |
| Delivery status | Annealed | Shape | Flat target Rotating target Special-shaped customization |
| Brand Name | PRM | Model Number | Custom |
| Certification | ISO9001 | Place of Origin | China |
| High Light | Optical Coating Tantalum Target ，PVD Coating Tantalum Sputtering Target ，Semiconductor Coating Tantalum Sputtering Target | ||
Product Information:
| Name | PVD coating tantalum target |
| Grade | Ta1 Ta2 RO5200 RO5400 RO5252 RO5255 |
| Purity | ≥99.95% |
| Density | 16.68g/cm3 |
| Surface | Machined surface, no pits, scratches, stains, burrs and other defects |
| Standard | ASTM B708 |
| Shape | Flat target, Rotating target ,Special-shaped customization |
Chemical Content of PVD Coating Tantalum Target:
| Grade | Main elements | Impurity content less than % | |||||||||||
| Ta | Nb | Fe | Si | Ni | W | Mo | Ti | Nb | O | C | H | N | |
| Ta1 | Remain | —— | 0.005 | 0.005 | 0.002 | 0.01 | 0.01 | 0.002 | 0.04 | 0.02 | 0.01 | 0.0015 | 0.01 |
| Ta2 | Remain | —— | 0.03 | 0.02 | 0.005 | 0.04 | 0.03 | 0.005 | 0.1 | 0.03 | 0.01 | 0.0015 | 0.01 |
| TaNb3 | Remain | ＜3.5 | 0.03 | 0.03 | 0.005 | 0.04 | 0.03 | 0.005 | —— | 0.03 | 0.01 | 0.0015 | 0.01 |
| TaNb20 | Remain | 17.0～23.0 | 0.03 | 0.03 | 0.005 | 0.04 | 0.03 | 0.005 | —— | 0.03 | 0.01 | 0.0015 | 0.01 |
| Ta2.5W | Remain | 0.005 | 0.005 | 0.002 | 3 | 0.01 | 0.002 | 0.04 | 0.02 | 0.01 | 0.0015 | 0.01 | |
| Ta10W | Remain | 0.005 | 0.005 | 0.002 | 11 | 0.01 | 0.002 | 0.04 | 0.02 | 0.01 | 0.0015 | 0.01 | |
Feature of PVD Tantalum Target:
High melting point,
Low steam pressure,
Good cold working performance,
High chemical stability,
Strong resistance to liquid metal corrosion,
The surface oxide film has a large dielectric constant
Application:
The tantalum target and the copper back target are welded, and then semiconductor or optical sputtering is performed, and the tantalum atoms are deposited on the substrate material in the form of oxides to achieve sputtering coating; tantalum targets are mainly used in semiconductor coating, optical coating and other industries . In the semiconductor industry, metal (Ta) is currently mainly used to coat and form a barrier layer through physical vapor deposition (PVD) as a target material.
We can process according to customer's drawing, and produce Ta rod,plate,wire,foil,crucible etc.
Please send us an inquiry for more information
Company Details
Business Type:
Manufacturer,Exporter
Year Established:
2010
Total Annual:
1000000-5000000
Employee Number:
20~50
Ecer Certification：
Site Member
Shaanxi Peakrise Metal Co., Ltd. is an rich experienced tungsten,molybdenum, tantalum, niobium, titanium,zirconium,nickel non-ferrous metal production enterprise,main products include tungsten-copper alloy, molybdenum-copper alloy, tungsten-molybdenum alloy, high specific gravity tungsten alloy, tan... Shaanxi Peakrise Metal Co., Ltd. is an rich experienced tungsten,molybdenum, tantalum, niobium, titanium,zirconium,nickel non-ferrous metal production enterprise,main products include tungsten-copper alloy, molybdenum-copper alloy, tungsten-molybdenum alloy, high specific gravity tungsten alloy, tan...
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