Payment Terms | L/C, T/T, Western Union, MoneyGram |
Supply Ability | 50 Metric Tons per Month |
Delivery Time | 3-5 days |
Packaging Details | WOODEN CASE |
Shape | Customised |
Chemical Composition | W |
Relative Density (%) | ≥99 |
Ra | ≤1.6 |
Application | thickness and smooth erosion |
Product name | Ultra high purity material tungsten alloy w sputtering target |
Purity (wt.%) | 99.9%~99.995% |
Grain Size | ≤50 |
Dimension (mm) | ≤D.452 |
Brand Name | FGD |
Model Number | fgd t-002 |
Certification | ISO9001, ISO14000 |
Place of Origin | China |
View Detail Information
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Product Specification
Payment Terms | L/C, T/T, Western Union, MoneyGram | Supply Ability | 50 Metric Tons per Month |
Delivery Time | 3-5 days | Packaging Details | WOODEN CASE |
Shape | Customised | Chemical Composition | W |
Relative Density (%) | ≥99 | Ra | ≤1.6 |
Application | thickness and smooth erosion | Product name | Ultra high purity material tungsten alloy w sputtering target |
Purity (wt.%) | 99.9%~99.995% | Grain Size | ≤50 |
Dimension (mm) | ≤D.452 | Brand Name | FGD |
Model Number | fgd t-002 | Certification | ISO9001, ISO14000 |
Place of Origin | China | ||
High Light | w-ti metal sputtering targets ,planar billet metal sputtering targets ,sputtering targets for semiconductor fabrication |
Ultra high purity tungsten alloy W-Ti sputtering target Plate Planar Billet for Semiconductor Physical Vapor Deposition
Tungsten-titanium (WTi) films are known to act as the effective diffusion barrier between Al and Si in semiconductor and photovoltaic cells industry. WTifilms are typically deposited as thin films by physical vapor deposition (PVD) through sputtering of a WTialloy target. It is desirable to produce a target that will provide film uniformity,minimum particle generation during sputtering, and desired electrical properties. In order to meet the reliability requirements for diffusion barriers of complex integrated circuits, the WTialloy target must have high purity and high density.
Type | W (wt.%) | Ti (wt.%) | Purity (wt.%) | Relative Density (%) | Grain Size (µm) | Dimension (mm) | Ra (µm) |
WTi-10 | 90 | 10 | 99.9-99.995 | ≥99 | ≤20 | ≤Ø452 | ≤1.6 |
WTi-20 | 80 | 20 | 99.9-99.99 | ≥99 | ≤20 | ≤Ø452 | ≤1.6 |
WTi | 70-90 | 10-30 | 99.9-99.995 | ≥99 | ≤20 | ≤Ø452 | ≤1.6 |
Company Details
Business Type:
Manufacturer
Year Established:
2001
Total Annual:
1000000-100000000
Employee Number:
100~500
Ecer Certification:
Site Member
Luoyang Forged Tungsten-Molybdenum Material Co., Ltd. is concentrated on the R&D, manufacture, and sales of rare refractory metals for more than 16 years. We specially produce the deep processing produts of tungsten, molybdnum, titanium, tantalum, niobium and alloy products upon the advantage of... Luoyang Forged Tungsten-Molybdenum Material Co., Ltd. is concentrated on the R&D, manufacture, and sales of rare refractory metals for more than 16 years. We specially produce the deep processing produts of tungsten, molybdnum, titanium, tantalum, niobium and alloy products upon the advantage of...
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