SHANGHAI ROYAL TECHNOLOGY INC.
| Payment Terms | L/C, D/A, D/P, T/T |
| Supply Ability | 6 sets per month |
| Delivery Time | 16 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Deposition Sources | DC / MF Sputtering Cathodes |
| Technique | PECVD, Balanced/Unbalanced Magentron Sputtering Cathode |
| Applications | Automotive, semiconductor, SiC Coating, DLC film deposition, |
| Film Features | wear resistance, strong adhesion, decorative coating colors |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | FCEV1200 |
| Certification | CE certification |
| Place of Origin | Made in China |
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Product Specification
| Payment Terms | L/C, D/A, D/P, T/T | Supply Ability | 6 sets per month |
| Delivery Time | 16 weeks | Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Deposition Sources | DC / MF Sputtering Cathodes | Technique | PECVD, Balanced/Unbalanced Magentron Sputtering Cathode |
| Applications | Automotive, semiconductor, SiC Coating, DLC film deposition, | Film Features | wear resistance, strong adhesion, decorative coating colors |
| Factory Location | Shanghai city, China | Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program | Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication | Brand Name | ROYAL |
| Model Number | FCEV1200 | Certification | CE certification |
| Place of Origin | Made in China | ||
| High Light | thin film coating equipment ，dlc coating equipment | ||
PECVD Hydrogen Fuel Cell Power Module Sputtering System / SiC Fuel Cell Vacuum Metalizing Machine
FCV is the short name of Fuel Cell Vehicles, it is the newest technology for next generation of green cars. It can generate electrical energy continuously by electrochemical reaction between oxygen and hydrogen. It is different from the primary battery such as dry cell and rechargeable battery that needs to repeat charging.
The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.
Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.
It is 100% envrionmetally friendly technology and vechiles.
Our machine RTSP1213-DC model is exclusively designed and developed for this appliation. We cooperated with Shanghai Jiaotong Unversity and SAIC Motor Corporation Limited Company.
Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.
The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.
Hydrogen Fuel Cell Power Module Sputtering System Specifications
| MODEL | RTSP1213-DC | |||||||||
| MATERIAL | Stainless Steel (S304) | |||||||||
| CHAMBER SIZE | Φ1250*1350mm (H) | |||||||||
| CHAMBER TYPE | Front and back 2-doors structure, Vertical | |||||||||
| SINGLE PUMP PACKAGE | Rotary Piston Vacuum Pump | |||||||||
| Roots Vacuum Pump | ||||||||||
| Magnetic Suspension Molecular Pump | ||||||||||
| Rotary Vane Pump (Holding Pump) | ||||||||||
| TECHNOLOGY | Magnetron Sputtering, Ion Source PECVD | |||||||||
| POWER SUPPLY | Sputtering power supply + Bias Power supply + Ion Source | |||||||||
| DEPOSITION SOURCE | 2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source | |||||||||
| CONTROL | PLC+Touch Screen | |||||||||
| GAS | Gas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen | |||||||||
| SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipment | |||||||||
| COOLING | Cooling Water | |||||||||
| CLEANING | Glow Discharge/Ion Source | |||||||||
| POWER MAX. | 150KW | |||||||||
| AVERAGE POWER CONSUMPTION | 75KW | |||||||||
The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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