Bell Jar Vacuum Metallizing System C60 Inductive Deposition Machine CE

Product Specification

                                           Inductive Evaporation Coating Machine

Summary:

Induction heating is widely used in different fields due to high process productivity and universality, cleanness and possibility of full automation. As one method of PVD thermal evaporation technology, the process is friendly for environment. Since the induction allows reaching temperature of 2000℃ and more, this method is very suitable for industrial production and scientific researches.

The RTEP0404 Induction Evaporation Coating Machine is designed for C60 evaporating deposition on varies of materials. C60 manufactures provides R&D and testing results for prospective. A strong tool assisting them to expand new applied industries.

The first set is produced for Shanghai University. Industrial production model is under processing. 

Main Applications:

To deposit thin film layers and coatings on

• Semiconductors
• Glass
• Polymers
• Electronics
• Optics
• Other Industrial products including food packaging films, metal strips etc.

Type:

Vertical orientation, Bell Jar Model, Top Opening

Design Features:

• Ultra-high ultimate vacuum pressure : up to 9.0*10^-5 Pa;
• Fast heating up devices for a good adhesion;
• Robust, compact and solid coating system;
• Exclusively induction heating evaporation source design for C60 deposition;
• Induction evaporator’s power: RF currency

Technical Specifications:

• Performance

1. Ultimate Vacuum Pressure: better than 9.0*10^-5 Pa;

• Operating Vacuum Pressure: 6.0*10^-4 Pa ~9.0*10^-4 Pa;

Base Vacuum pressure: 3.0*10^-4 Pa

3. Pumping down Time: from 1 atm to 2.0×10^-3 Pa≤25 minutes ( room temperature, dry, clean and empty chamber)

4. Deposition source: induction evaporator, crucible

5. Operating Model: Manually

6. Heating: from room temperature up to max. 1000℃,

7. Evaporation Power:  RF radio frequency and power supply

8. Working Gas: Ar 

• Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber

1.1 Size: Inner Diameter 400mm

     Inner Height:400mm

1.2 Material: Vacuum Chamber SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Evaporation Shield : SUS304

1.4 View Window: on chamber door

1.5 Vacuum Chamber Venting Valve (including silencer)

2. Roughing Vacuum Pumping System:
Two-stage Oil Rotary Vane Pump

3. High Vacuum Pumping System: Turbo Molecular Pump

4. Electrical Control and Operation System- HMI operation unit

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Evaporation Power

4.3 Evaporation Control System

4.4 Operation System: PLC

4.5 Measuring System

Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

5. Deposition System

5.1 Deposition source: induction thermal evaporator

5.2 Deposition material: C60

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System:Water flow pipe and switch valve system

6.3 Working gas: Ar (>99.99%)

7. Working Environment

Compressed Air: 5~8kg/cm2

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,

Power: 3 Phase 380V 50Hz(60Hz), 8kVA, average power consumption: 3kVA

Installation Area: (L*W*H) 2000*200*2000mm

         Exhaust: Vent for mechanical pumps

Automatically pulling Up-Down Unit to Open/Close the chamber

Electrical Enclosure System:

Security Tips:

Shileding Protection from RF radiation

We have been endeavored to design and develop the most suitable coating system which meet our customer high production efficiency and coating quality requests.

If customized coating system is required by your company, please share your thoughts, ideas with our team and submit your products specifications, we will work together to sort out the best solutions.