R & D Multiple - Functions Vacuum Coating Equipment MF / DC Sputtering Cathodes,

Product Specification

R & D Multiple - Functions Vacuum Coating Equipment MF / DC Sputtering Cathodes

R&D Multiple-Functions Vacuum Coating Equipment

Keywords: PVD Hard Coatings, PECVD process, DLC film, Diamond Like Carbon Film, Sputtering Optical film, Gencoa Magnetron Sputtering Cathode, Ion Source, PA PVD

RTAC950-SP Design Features:

• Flexibility: arc and sputter sources, linear ion source devices mounting flanges are standardized for flexible exchange
• Versatility: available for deposit variety of base metals and alloys, optical coatings and hard coatings, soft coatings. Compound films and solid lubricating films on the metallic and non-metallic materials substrates
• Straight forward design: 2-door structure, front and back opening for easy maintenance.

Technical Specifications

• Performance

1. Ultimate Vacuum Pressure: better than 8.0*10^-4 Pa;

• Base Vacuum pressure: 3.0*10^-2 Pa

3. Pumping down Time: from atm to 1.0×10^-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)

4. Deposition source: Gencoa magnetron sputtering cathodes, steered arc cathodes, Ion source

5. Operating Model: Full Automatically /Semi-Auto/ Manually

6. Heating: from room temperature up to max. 500℃,

9. Ion source for PECVD and PA PVD process.

• Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber
1.1 Size: Inner Depth 950mm

Inner Height:1350mm

1.2 Material: Vacuum Chamber SUS304

Door and flanges SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Chamber Shield : SUS304

1.4 View Window: on chamber doors -2

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door: 2 sets, front and back, SUS304 material

2. Roughing Vacuum Pumping System:
Oil rotary vane vacuum pump + Holding Pump

3. High Vacuum Pumping System:

Turbo Molecular Pump - 2 sets

4. Electrical Control and Operation System- PLC+ Touch ScreenOperation System:

Suppliers:

PLC: Mitsubishi, Model:FX-IN60MR-001 SERIES

Electronic Components: SCHNEIDER,OMRON.

Safety Protecting System: Numerous safety interlocks to protect operators and equipment ( water, current gas, temperature etc.)

Coating Processes System: Process Automation & Control. Automatically saved in memory for 3 months. Featured coating recipes data: target operation current/voltage, Mass Flow, Vacuum pressure, temperature, coating times are saved for an analysis to enhance the coatings quality.

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Power Supply: MF sputtering power + DC Arc power + Bias Power Supply

4.3 Deposition control system

4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5 Measuring System

Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand

Temperature measuring device: Thermocouple
MFC: Mass Flow Controller ( 4 ways ),

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

5. Deposition System

5.1 Deposition source: Sputtering cathodes+ Arc sources + Ion Source

5.2 Deposition material: ITO, Titanium, Chrome, Aluminum, Stainless Steel, TiAl etc.

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System:Water flow pipe and switch valve system

7. Working Environment

Compressed Air: 5~8kg/cm2

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,

Power: 3 Phase 380V 50Hz(60Hz), 130kVA, average power consumption: 60KW

Installation Area: (L*W*H)4400*3200*2950mm

Exhaust: Vent for mechanical pumps

Applications

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.